Molecular Beem Epitaxy

Technique of growing single crystals in which beams of atoms or molecules are made to strike a single-crystalline substrate in a vacuum, giving rise to crystals whose crystallographic orientation is related to that of the substrate.

NOTE 1. The beam is defined by allowing the vapour to escape from the evaporation zone to a high vacuum zone through a small orifice.

NOTE 2 Nanostructures can be grown in this method by exploiting strain, e.g., InAs dots on GaAs substrate.

Source:
BSI. PAS 135:2007. Terminology for nanofabrication.