Microelectromechanical Systems
Systems with dimensions in the microscale that can respond to an electric (mechanical) stimulus and generate or produce a mechanical (electric) response. NOTE. MEMS may be used in nanometrology as they might be sensitive to nanoscale properties. Source:
BSI. PAS 134:2007. Terminology for nanoscale measurement and instrumentation
Microelectromechanical systems (MEMS) is the technology of the very small, and merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines (in Japan), or Micro Systems Technology - MST (in Europe).MEMS are separate and distinct from the hypothetical vision of Molecular nanotechnology or Molecular Electronics. MEMS are made up of components between 1 to 100 micrometers in size and MEMS devices generally range in size from 20 micrometers to a millimeter. They usually consist of a central unit that processes data, the microprocessor and several components that interact with the outside such as microsensors. At these size scales, the standard constructs of classical physics do not always hold true. MEMS became practical once they could be fabricated using modified semiconductor fabrication technologies, normally used to make electronics. These include molding and plating, wet etching and dry etching, electro discharge machining, and other technologies capable of manufacturing very small devices. Source:
Wikipedia. Microelectromechanical systems
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